Compare Prices | Create Shopping Lists with Price Drop Alerts | Set Coupons, Promo Codes & Sales Alerts | Get Access to Exclusive Deals and Much More... All in One Place | Read all about it here

Dry Etching for VLSI

Dry Etching for VLSI

Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9781489925664
Condition
New
Product Description

This book has been written as part of a series of scientific books being published by Plenum Press. The scope of the series is to review a chosen topic in each volume. To supplement this information, the abstracts to the most important references cited in the text are reprinted, thus allowing the reader to find in-depth material without having to refer to many additional publications. This volume is dedicated to the field of dry (plasma) etching, as applied in silicon semiconductor processing. Although a number of books have appeared dealing with this area of physics and chemistry, these all deal with parts of the field. This book is unique in that it gives a compact, yet complete, in-depth overview of fundamentals, systems, processes, tools, and applications of etching with gas plasmas for VLSI. Examples are given throughout the fundamental sections, in order to give the reader a better insight in the meaning and magnitude of the many parameters relevant to dry etching. Electrical engineering concepts are emphasized to explain the pros and cons of reactor concepts and excitation frequency ranges. In the description of practical applications, extensive use is made of cross-referencing between processes and materials, as well as theory and practice. It is thus intended to provide a total model for understanding dry etching. The book has been written such that no previous knowledge of the subject is required. It is intended as a review of all aspects of dry etching for silicon semiconductor processing.

Available Colors
Available Sizes
1 Offer Price Range: $129.00 - $129.00
BEST PRICE

Single Product Purchase

$129.00
@ Link.springer.com     BUY Now

Price Comparison

Seller Contact Seller List Price On Sale Shipping Best Promo Final Price Volume Discount Financing Availability Seller's Page
BEST PRICE
1 Product Purchase
@ Link.springer.com
Contact Store Call Store Contact Support
$129.00 $129.00

$129.00
See Site In stock Visit Store

Similar Products

Privacy and the Commercial Use of Personal Information

$109.99

The Problem of Critical Ontology

$54.99

Halbleiter-Bauelemente

$39.99

Ice Cream

$169.99

The Princess and the Pea

$3.71

Lehrbuch der Nervenkrankheiten

$69.95

Community Mental Health

$54.99

The Military History of the Soviet Union

$84.99

Computational Methods in Chemical Engineering with Maple

$84.99

Gestalt im Management

$44.99

Stadien der Flugmuskelgenese holometaboler Insekten

$54.99

Die nichtzentrale t-Verteilung

$59.99

Nichteisenmetalle

$74.99

Advances in Information and Communication

$249.99

Klimatologie und Vegetationsverhltnisse der Athos-Halbinsel und der ostgischen Inseln Lemnos, Evs

$84.99

Self-Incompatibility in Flowering Plants

$169.99

Obstructive Sleep Apnea

$219.99

State Capacity Building in Contemporary China

$54.99

The Last Council: A Graphic Novel (Amulet #4)

$9.74

MATLAB Machine Learning Recipes

$34.99

Von der Familientherapie zur systemischen Perspektive

$49.99

Advanced Newtonian Rigid Dynamics

$179.99

Public-Key Cryptography: State of the Art and Future Directions

$39.99

The Geneva Conference of 1954 on Indochina

$54.99

Economic Evaluation of Transport Projects

$59.99

Die Entscheidung zur Funktionsverlagerung im Konzern

$79.99

Training for Change

$129.99

Zombie Season: Zombie Season

$5.99

Management Decision Support Systems

$14.99

Das psychiatrische Krankenhaus

$69.99

Computer and Communication Engineering

$79.99

Frequenzanalysen der Herztne mit einem Herztonspektrographen. Elektronischer Herztonspektrograph

$59.99

Mining Latent Entity Structures

$39.99

Lost in Practice: Transforming Nordic Educational Action Research

$49.99

Dedicated Mobile Communications for High-speed Railway

$169.99

Gamification of Electronic Negotiation Training

$109.99

Der Massivbau

$84.99

Diffusion Processes in Advanced Technological Materials

$219.99

Biomechanics of Motion

$54.99

Der Weg nach ganz oben

$64.99