Compare Prices | Create Shopping Lists with Price Drop Alerts | Set Coupons, Promo Codes & Sales Alerts | Get Access to Exclusive Deals and Much More... All in One Place | Read all about it here

The Physics of Submicron Lithography

The Physics of Submicron Lithography

Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9781461533184
Condition
New
Product Description

This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit.

Available Colors
Available Sizes
1 Offer Price Range: $169.00 - $169.00
BEST PRICE

Single Product Purchase

$169.00
@ Link.springer.com     BUY Now

Price Comparison

Seller Contact Seller List Price On Sale Shipping Best Promo Final Price Volume Discount Financing Availability Seller's Page
BEST PRICE
1 Product Purchase
@ Link.springer.com
Contact Store Call Store Contact Support
$169.00 $169.00

$169.00
See Site In stock Visit Store

Similar Products

Sliding-Mode Control and Variable-Structure Systems

$189.00

Maritime Psychology

$169.99

East and West in the Energy Squeeze

$44.99

Beitrge zur Geschichte der Technik und Industrie

$59.99

Vibro-Acoustics, Volume 1

$89.99

Structures in Logic and Computer Science

$39.99

Hren als Praxis

$64.99

Berichte zur Resistenzmonitoringstudie 2011/2012

$37.99

Metropolitan Landscapes

$159.99

Critical Perspectives on Child Sexual Exploitation and Related Trafficking

$89.00

How Do Dinosaurs Stay Safe? (Hardcover)

$14.24

ber die atmosphrischen Gezeiten

$54.99

Asia-Pacific Conference on Science and Management of Coastal Environment

$169.99

Computer Vision ECCV 2024

$64.99

Collective Improvisation in a Teacher Education Community

$84.99

Analysis of Shells, Plates, and Beams

$149.00

Projektvertrge im Anlagenbau und fr vergleichbare Investitionsprojekte

$59.99

Genetic Resources of Mediterranean Pasture and Forage Legumes

$169.00

Formation and Cooperative Behaviour of Protein Complexes on the Cell Membrane

$54.99

Proceedings of IncoME-VI and TEPEN 2021

$219.99

Climate Change

$169.99

Khler-Einstein Metrics and Integral Invariants

$19.99

Gewalt und Mimikry

$59.99

Mathematical Methods in Physics

$84.99

The French Language in the Digital Age

$54.99

Rehabilitation in Kardiologie und Angiologie

$59.99

Distant Worlds

$39.99

kologische Dimension der Logistik

$49.99

Angewandte Mathematik mit Mathcad Lehr- und Arbeitsbuch

$34.99

Refugees and Asylum Seekers in East Asia

$59.99

E-Cigarettes and the Comparative Politics of Harm Reduction

$59.99

Social Inclusion: Societal and Organizational Implications for Information Systems

$109.99

Grundrisz der Verfassung und Verwaltung in Preuen und dem Deutschen Reiche

$44.99

Abstract Pattern Illustrations for Textile Printing

$139.99

Therapeutische Endoskopie im Gastrointestinaltrakt

$139.00

Modeling and Design of Flexible Pavements and Materials

$79.99

Spontan-und Provokations-Nystagmus als Krankheitssymptom

$59.99

Dynamic Routing in Broadband Networks

$84.99

Reviewing Blindness in French Fiction, 17892013

$79.99

Onychomycosis

$89.00