Rapid Thermal Processing of Semiconductors
Rapid Thermal Processing of Semiconductors
Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9781489918062
Condition
New
Product Description
Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
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