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Mikrosystemtechnik
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Dieses Lehr- und Nachschlagebuch erlutert die grundlegenden Prozessschritte der Mikrotechnologien fr Elektronik, Mechanik und Optik. Darauf aufbauend folgen die Verknpfungen der Einzelprozesse zur Mikrosystemtechnik. Die mglichen Schnittstellen Mechanik/Elektronik, Optik/Elektronik und Optik/Mechanik werden anhand konkreter mikrosystemtechnischer Bauelemente vorgestellt. Die jeweiligen Vorteile der Oberflchenmikromechanik und der Bulk-Mikromechanik werden anhand der erforderlichen Prozesstechnik zur Integration mikrosystemtechnischer Sensoren und Aktoren diskutiert und bezglich ihrer Kompatibilitt zur Mikroelektronik bewertet.
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