Copied Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
Feature Profile Evolution in Plasma Processing Using On-wafer Monitoring System
This book provides for the first time a good understanding of the etching profile technologies that do not disturb the plasma. Three types of sensors are introduced: on-wafer UV sensors, on-wafer charge-up sensors and on-wafer sheath-shape sensors in the plasma processing and prediction system of real etching profiles based on monitoring data. Readers are made familiar with these sensors, which can measure real plasma process surface conditions such as defect generations due to UV-irradiation, ion flight direction due to charge-up voltage in high-aspect ratio structures and ion sheath conditions at the plasma/surface interface. The plasma etching profile realistically predicted by a computer simulation based on output data from these sensors is described.
Price Comparison
| Seller | Contact Seller | List Price | On Sale | Shipping | Best Promo | Final Price | Volume Discount | Financing | Availability | Seller's Page |
|---|---|---|---|---|---|---|---|---|---|---|
|
BEST PRICE 1 Product Purchase
|
|
$39.99 | $39.99 |
|
$39.99 | See Site | In stock | Visit Store |
Reviews
Questions & Answers
Feinstruktur-Untersuchungen an knstlichen Zellulosefasern verschiedener Herstellungsverfahren
$59.99
Serotonin
$169.00
Cleaner Technologies and Cleaner Products for Sustainable Development
$84.99
Nonlinear Analysis and Variational Problems
$129.00
The Mathematics Education of Prospective Secondary Teachers Around the World
$19.99
The First European Elections
$54.99
A Short History of the Liberal Party 19001984
$74.99
Thermo-Mechanically Coupled Cyclic Deformation and Fatigue Failure of NiTi Shape Memory Alloys
$169.00
Rural Families and Communities in the United States
$109.99
Computational Methods to Study the Structure and Dynamics of Biomolecules and Biomolecular Processes
$169.00
Learning Analytics und Knstliche Intelligenz in Studium und Lehre
$59.99
Effector-Triggered Immunity
$249.99
Women, Work and Sociability in Early Modern London
$109.99
Allgemeine und systematische Pharmakologie und Toxikologie
$69.95
Digital Transformation
$54.99
Science Education for Sustainable Development in Asia
$159.99
Licht werden Imagination in Therapie und Beratung
$44.99
Thermophilic Carboxydotrophs and their Applications in Biotechnology
$54.99
Migration and Urban Transitions in Australia
$169.99
Untersuchungen des Gefgeeinflusses auf die Gre der rntgenographischen Elastizittskonstanten
$59.99
An Introduction to Classical Complex Analysis
$39.99
Web and Internet Economics
$54.99
Risk Analysis in Nuclear Waste Management
$54.99
Interkulturelle Kompetenz durch Auslandsaufenthalte
$59.99
Multiple Sclerosis
$39.99
Basic Calculus of Planetary Orbits and Interplanetary Flight
$49.99
Water-in-Plants Bibliography
$54.99
Research on Destruction of the North China Craton
$99.00
Energy Consumption, Chemical Use and Carbon Footprints of Wastewater Treatment Alternatives
$109.99
Diversity and Contestations over Nationalism in Europe and Canada
$169.99
The Role of State Aid in the European Fiscal Integration
$99.00
Arabien: Mehr als Erdl und Konflikte
$59.99
Pioneers in Angiography
$109.99
Governance in Transition
$109.99
Handbuch Bildungsforschung
$119.99
The Beatles, Popular Music and Society
$54.99
Future Information Technology
$109.99
Photosynthesis in Algae
$259.00
Samuel Taylor Coleridge
$54.99
Catecholamines and Behavior 1
$39.99
