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Silizium-Planartechnologie
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Die Grundlagen der Mikroelektronik werden kompakt und in leicht verstndlicher Form vorgestellt. Der Leser erfhrt, wie integrierte Schalkreise hergestellt werden, wie sie funktionieren und wie ihre Grundelemente physikalisch beschrieben werden knnen. Aufgrund der groen Bedeutung von Simulationsprogrammen in der Silizium-Planartechnologie wird ergnzend auf CAD-Werkzeuge von der Prozesssimulation (z. B. ISE-TCAD) bis hin zur Schaltungssimulation (z. B. SPICE) eingegangen.
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