Temperature Measurement during Millisecond Annealing

Name: Temperature Measurement during Millisecond Annealing
Brand: Springer Nature
SKU: 9783658113889
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Springer Nature

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9783658113889

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Product Description

Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the methods suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.

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