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Technologien der Mikrosysteme
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Das Buch vermittelt die Grundlagen zur Herstellung und dem Aufbau von Mikrosystemen. Es kann in zwei Teile aufgeteilt werden. Der Schwerpunkt von Teil I liegt hierbei auf den Mikrofertigungsprozessen und behandelt die Siliziumtechnologie, mikromechanische Strukturierungs- (anisotropes tzen, DRIE) und Bondprozesse (Eutectic Bonding, Fusion Bonding). Teil II behandelt die Aufbau- und Verbindungstechnik fr Mikrosysteme und vermittelt Kenntnisse zu den Prinzipien der Chipmontage. Dabei stehen u.a. die Beschichtungstechnologien (Metallisierungssysteme) und Kontaktiertechnologien (Lten, Kleben, Bonden) im Vordergrund.
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