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Silizium-Halbleitertechnologie
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Das Lehrbuch behandelt die Grundlagen und die technische Durchfhrung der Einzelprozesse zur mikroelektronischen Schaltungsintegration in der Silizium-Halbleitertechnologie. Die Integrationstechnik setzt sich aus einer Vielzahl von sich wiederholenden Einzelprozessen zusammen, deren Durchfhrung und apparative Ausstattung extremen Anforderungen gengen mssen, um die geforderten Strukturgren bis zu wenigen Nanometern gleichmig und reproduzierbar zu erzeugen. Das Zusammenspiel der Oxidationen, tzschritte und Implantationen zur Herstellung von MOS- und Bipolarschaltungen werden - ausgehend vom Rohsilizium bis zur gekapselten integrierten Schaltung - aus Sicht der Prozessfhrung erlutert. Moderne 3D-Bauformen fr Feldeffekttransistoren runden den Inhalt ab.
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