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Montage hybrider Mikrosysteme
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Product Details
Das Buch beschreibt die Technologien rund um die Montage hybrider Mikrosysteme. Nicht der Entwurf oder das Mikrosystem als solches stehen im Vordergrund, sondern die Fertigungstechnologien zu ihrer Beherrschung. Neben den reinen Fgeverfahren werden die Handhabung sowie die Prozessberwachung und -steuerung, die Sensorentwicklung und -integration und die zu verwendenden Werkstoffe behandelt. Ziel des Buches ist eine umfassende Dokumentation neuer Montage- und Fgetechnologien fr hybrid aufgebaute, nicht fr monolithische Mikrosysteme. Es dient dem Wissenschaftler ebenso wie dem Anwender als untersttzendes Werkzeug fr die Auswahl des aus technologischer Sicht prdestinierten Verfahrens fr hybride Mikrosysteme.
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