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Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

Fundamental Aspects of Ultrathin Dielectrics on Si-based Devices

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Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9780792350071
Condition
New
Product Description

An extrapolation of ULSI scaling trends indicates that minimum feature sizes below 0.1 mu and gate thicknesses of.

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