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Mikrosystemtechnik

Mikrosystemtechnik

Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9783835190221
Condition
New
Product Description

Dieses Lehr- und Nachschlagebuch erlutert die grundlegenden Prozessschritte der Mikrotechnologien fr Elektronik, Mechanik und Optik. Darauf aufbauend folgen die Verknpfungen der Einzelprozesse zur Mikrosystemtechnik. Die mglichen Schnittstellen Mechanik/Elektronik, Optik/Elektronik und Optik/Mechanik werden anhand konkreter mikrosystemtechnischer Bauelemente vorgestellt. Die jeweiligen Vorteile der Oberflchenmikromechanik und der Bulk-Mikromechanik werden anhand der erforderlichen Prozesstechnik zur Integration mikrosystemtechnischer Sensoren und Aktoren diskutiert und bezglich ihrer Kompatibilitt zur Mikroelektronik bewertet.

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