Copied Einfhrung in die Mikrosystemtechnik
Einfhrung in die Mikrosystemtechnik
Mikrosystemtechnik trgt dem Bedarf an fundiertem Fachwissen dieser knftigen Schlsseltechnologie Rechnung. Als Lehrbuch konzipiert, erschliet es dem Leser Grundlagen und Anwendungen komplexer Mikrosysteme, in denen elektronische, mechanische und optische Funktionselemente auf kleinstem Raum integriert sind.
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