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Protonendotierung von Silizium

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Product Details

Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9783658073893
Condition
New
Product Description

Johannes G. Laven beschreibt die Dotierung von kristallinem Silizium mittels Protonenimplantationen mit Energien im Bereich weniger Megaelektronenvolt. Hiermit knnen Dotierungsprofile in Tiefen zwischen Mikrometern bis weit ber 100 m erzeugt und modifiziert werden. Das hierzu notwendige, vergleichsweise niedrige thermische Budget macht derartige Dotierungsprofile insbesondere fr die Herstellung aktueller Leistungshalbleiterbauelemente interessant. Der Autor fhrt die Anforderungen und Grenzen der Protonendotierung aus und zeigt ein analytisches Modell zur Berechnung von Protonen-induzierten Dotierstoffprofilen in Abhngigkeit der Implantationsparameter sowie des thermischen Budgets.

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