Silicon Semiconductor Technology

Name: Silicon Semiconductor Technology
Brand: Springer Nature
SKU: 9783658410407
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Product Details

Brand

Springer Nature

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Part Number

GTIN

9783658410407

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New

Product Description

The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching, doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includes modern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineers view.

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