Breaking News!
60% Off the Hottest Halloween Costumes & Accessories

Pulsed and Pulsed Bias Sputtering

Best Price (Coupon Required):
Buy Pulsed and Pulsed Bias Sputtering for $76.50 at @ Link.springer.com when you apply the 10% OFF coupon at checkout.
Click “Get Coupon & Buy” to copy the code and unlock the deal.

Set a price drop alert to never miss an offer.

1 Offer Price Range: $84.99 - $84.99
BEST PRICE

Single Product Purchase

$76.50
@ Link.springer.com with extra coupon

Price Comparison

Seller Contact Seller List Price On Sale Shipping Best Promo Final Price Volume Discount Financing Availability Seller's Page
BEST PRICE
1 Product Purchase
@ Link.springer.com
$84.99 $84.99

10% OFF
This deals requires coupon
$76.50
See Site In stock Visit Store

Product Details

Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9781402075438
Condition
New
Product Description

Diffusion Barrier Stack - 5 nm -3 nm -2 nm :. . . -. . . . : . . O. 21-lm Figure 2: Schematic representing a cross-sectional view of the topography that is encountered in the processing of integrated circuits. (Not to scale) these sub-micron sized features is depicted in Fig. 2. The role of the diffusion barrier is to prevent the diffusion of metallic ions into the interlayer dielectric (lLD). Depending on the technology, in particular the choice of the ILD and the metal interconnect, the diffusion barrier may be Ti, Ta, TiN, TaN, or a multi-layered structure of these materials. The adhesion of the barrier to the dielectric, the conformality of the barrier to the feature, the physical structure of the film, and the chemical composition of the film are key issues that are determined in part by the nature of the deposition process. Likewise, after the growth of the barrier, a conducting layer (the seed layer) is needed for subsequent filling of the trench by electrochemical deposition. Again, the growth process must be able to deposit a film that is continuous along the topography of the sub-micron sized features. Other factors of concern are the purity and the texture of the seed layer, as both of these factors influence the final resistivity of the metallic interconnect. Sputter-deposited coatings are also commonly employed for their electro-optical properties. For example, an electrochromic glazing is used to control the flux of light that is transmitted through a glazed material.

Available Colors
Available Sizes

Reviews

0
0 reviews
5 stars
4 stars
3 stars
2 stars
1 star

Questions & Answers

Similar Products

Drop Dynamics and Dropwise Condensation on Textured Surfaces

Drop Dynamics and Dropwise Condensation on Textured Surfaces

$109.99
Grundlagen der Volkswirtschaftslehre aus globaler Sicht klipp & klar

Grundlagen der Volkswirtschaftslehre aus globaler Sicht klipp & klar

$19.99
Critical and Post-Critical Political Economy

Critical and Post-Critical Political Economy

$109.99
Intracellular Signaling Mediators in the Circulatory and Ventilatory Systems

Intracellular Signaling Mediators in the Circulatory and Ventilatory Systems

$169.00
bungsbuch frs erfolgreiche Staatsexamen in der Mathematik

bungsbuch frs erfolgreiche Staatsexamen in der Mathematik

$44.99
Quantum Theory: A Two-Time Success Story

Quantum Theory: A Two-Time Success Story

$169.99
Das Opportunittsprinzip im franzsischen Strafrecht

Das Opportunittsprinzip im franzsischen Strafrecht

$44.99
Afghanistan and the Coloniality of Diplomacy

Afghanistan and the Coloniality of Diplomacy

$99.99
Cosmic Gamma Rays, Neutrinos, and Related Astrophysics

Cosmic Gamma Rays, Neutrinos, and Related Astrophysics

$39.99
Distributionen und Hilbertraumoperatoren

Distributionen und Hilbertraumoperatoren

$44.99
Mixed Messages: Materiality, Textuality, Missions

Mixed Messages: Materiality, Textuality, Missions

$54.99
Shanghai Narrative

Shanghai Narrative

$129.99
Este perro

Este perro

$3.71
Mosquito Vectors of Japanese Encephalitis Virus from Northern India

Mosquito Vectors of Japanese Encephalitis Virus from Northern India

$54.99
Obstructive Uropathy

Obstructive Uropathy

$84.99
Analysis and Solutions for Switching Noise Coupling in Mixed-Signal ICs

Analysis and Solutions for Switching Noise Coupling in Mixed-Signal ICs

$169.99
Extracting Physics from Gravitational Waves

Extracting Physics from Gravitational Waves

$109.99
Lewisian Turning Point in the Chinese Economy

Lewisian Turning Point in the Chinese Economy

$109.99
Foreign Direct Investment by Smaller UK Firms: The Success and Failure of First-Time Investors Abroa

Foreign Direct Investment by Smaller UK Firms: The Success and Failure of First-Time Investors Abroa

$44.99
Samuel F.B. Morse

Samuel F.B. Morse

$59.99
Mdigkeit, Erschpfung und Schmerzen ohne ersichtlichen Grund

Mdigkeit, Erschpfung und Schmerzen ohne ersichtlichen Grund

$49.99
Living as Mapmakers

Living as Mapmakers

$39.99
Deutschsprachige Psychologinnen und Psychologen 19331945

Deutschsprachige Psychologinnen und Psychologen 19331945

$84.99
Project Engineering

Project Engineering

$39.99
Theoretische Methoden und experimentelle Verfahren zur Charakterisierung von Hochleistungslaserstrah

Theoretische Methoden und experimentelle Verfahren zur Charakterisierung von Hochleistungslaserstrah

$59.99
Fluctuations, Instabilities, and Phase Transitions

Fluctuations, Instabilities, and Phase Transitions

$54.99
Foundations of WPF

Foundations of WPF

$39.99
Chinese Rural Households in Relative Poverty and Their Economic Activities

Chinese Rural Households in Relative Poverty and Their Economic Activities

$119.99
Stochastic Processes and Integration

Stochastic Processes and Integration

$169.99
Making the Alliance Work

Making the Alliance Work

$44.99
Perspectives on the Use of New Information and Communication Technology (ICT) in the Modern Economy

Perspectives on the Use of New Information and Communication Technology (ICT) in the Modern Economy

$259.00
Die Bindung zwischen Kohlenstoffatomen, das Rckgrat der Organischen Chemie, und ihre Grenzen

Die Bindung zwischen Kohlenstoffatomen, das Rckgrat der Organischen Chemie, und ihre Grenzen

$54.99
Research Design in European Studies

Research Design in European Studies

$109.99
Recovering Biodiversity in Indian Forests

Recovering Biodiversity in Indian Forests

$54.99
Integrierte Produkt- und Prozessgestaltung

Integrierte Produkt- und Prozessgestaltung

$89.99
Semigroups and Their Applications

Semigroups and Their Applications

$109.99
VPC  Simulation und Test 2016

VPC Simulation und Test 2016

$139.99
Renal Fibrosis: Mechanisms and Therapies

Renal Fibrosis: Mechanisms and Therapies

$249.99
Input-Output Analysis

Input-Output Analysis

$219.99
Changes of Atmospheric Chemistry and Effects on Forest Ecosystems

Changes of Atmospheric Chemistry and Effects on Forest Ecosystems

$169.99
previous
next