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Modellierung von qualitts- und effektivittsbestimmenden Mechanismen beim Laserabtragen

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Brand
Springer Nature
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N/A
Part Number
0
GTIN
9783519062455
Condition
New
Product Description

Aus dem Inhalt Einfhrung: Ausgangslage - Phnomenologische Beschreibung des Laserabtragens - Qualitt und Effektivitt des Laserabtragens - Zielsetzung der Arbeit - Gliederung der Arbeit Modellierung des strukturierenden Abtrags: Dreidimensionales Abtragsmodell - Gltigkeitsgrenzen des Modells Qualittsbestimmende Mechanismen beim Strukturieren: Einflu der Vielfachreflexion beim Abtragen mit Excimerlaser ohne Werkstckvorschub -Strukturierung durch Abtrag mit Vorschub und variabler Maskengeometrie - Synopsis Simulation der Materialdampfexpansion: Phnomenologische Beschreibung der Expansion - Physikalische Formulierung der Expansion des verdampften Materials - Lsung mit dem Finite-Differenzen-Verfahren - Ergebnisse der Simulationsrechnungen - Synopsis Wechselwirkungsmechanismen im Materialdampf: Inverse Bremsstrahlung - Mie - Streuung - Auswirkung der Wechselwirkungsmechanismen auf die Materialdampfexpansion - Synopsis Effektivittsbestimmende Faktoren ermittelt durch ganzheitliche Betrachtungsweise: Einflu der Laserparameter auf die Effektivitt - Einflu des Umgebungsgases auf die Effektivitt - Synopsis Zusammenfassung und Ausblick Literatur Anhang: Werkstoffeigenschaften / Dissoziation und Ionisation / Diskretisierung der Eulergleichungen / Explizite Berechnung des komplexen Brechungsindexes / Kritischer Radius, minimale Energie, Clusterdichte.

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