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Intelligente Herstellung zuverlssiger Kupferbondverbindungen

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Product Details

Brand
Springer Nature
Manufacturer
N/A
Part Number
0
GTIN
9783662551455
Condition
New
Product Description

Dieses Buch beschreibt basierend auf dem gleichnamigen Innovationsprojekt im Spitzencluster its OWL die Entwicklung intelligenter Verfahren und Systeme, um auch unter variablen Produktionsbedingungen eine zuverlssige Massenfertigung von Kupferbondverbindungen sicherzustellen. Dabei wird der gesamte Prozess der Ultraschall-Verbindungsbildung modelliert. Dies beinhaltet u. a. ein Reibmodell mit gekoppeltem Anbindungsmodell, den Ultraschall-Erweichungseffekt und den Verschlei des Bondwerkzeugs. Zudem wird das Konzept einer selbstoptimierenden Bondmaschine vorgestellt, welche Prozessparameter in Abhngigkeit von Strgren wie Verschlei anpasst. Das Ultraschallbonden mit Aluminiumdraht ist ein etabliertes Fertigungsverfahren zur Kontaktierung von Leistungshalbleitern. Zuknftige Leistungshalbleiterchips erfordern jedoch einen Technologiewechsel zu Kupferdraht. Die Prozessparameter unterscheiden sich dabei deutlich von den bekannten Aluminiumprozessen, ihreWechselwirkungen sind weitestgehend unbekannt.

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